Sputter-ion Pumps
نویسندگان
چکیده
The following paper outlines the working principles of sputter-ion pumps. The pumping mechanisms for reactive and inert gas species, as well as argon instability are explained. The operating pressure range, special designs for integrated linear pumps in accelerators and operational aspects are discussed.
منابع مشابه
طراحی، بهینه سازی و ساخت پمپ کندوپاش یونی
Design and construction process of special kind of sputter ion pump is described briefly in this paper. In order to investigate the optimization of effective parameters in choosing and designing ILSF ion pumps, this pump has been designed and manufactured. By optimizing some parameters such as dimension and shape of penning cells, anode voltage, magnetic field and internal structure of pump, it...
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